Product Specification
| Power Supply : | 240V, 10A single inlet |
| Fuse Rating : | 10A |
| Plate Speed : | 0 - 100 rpm |
| Wafer Carrier Speed : | 0 - 100 rpm |
| Wafer Back Pressure : | 0 - 50 psi / 344kPa |
| Carrier Down Pressure : | 0.4 - 9 psi / 2.8kPa |
| Plate Size : | 400mm |
| Slurry Flow Rate : | 20-500mls/min |
| Timer : | 0-99 hours |
| Height : | 1123mm |
| Depth : | 726mm |
| Width : | 914mm |
| Weight : | 225Kg 524Kg (packed) |
For more information on the Tribo Chemical Mechanical Polishing system, call us on +44 (0)1389 875444 or complete our contact form.