Product Specification
| Power Supply : | 220V/240V, 50Hz (Single Phase) |
| Fuse Rating : | 6A |
| Plate Speed : | 10 - 100 rpm |
| Wafer Carrier Speed : | 10 - 100 rpm |
| Wafer Back Pressure : | 0 - 14 psi |
| Carrier Down Pressure : | 0.4 - 9 psi |
| Plate Size : | 400mm |
| Slurry Flow Rate : | 20-500mls/min |
| Timer : | 0-99 hours |
| Height : | 1130mm |
| Depth : | 730mm |
| Width : | 935mm |
| Weight : | 220Kg 360Kg (packed) |
For more information on the Tribo Chemical Mechanical Polishing system, call us on +44 (0)1389 875444 or complete our contact form.