Product Specification
| Power Supply : | 1Phase + Neutral + Earth |
| 220Vac-240Vac, 25 Amps, 50/60Hz | |
| Plate Speed : | 0 - 160 rpm |
| Wafer Carrier Speed : | 10 - 125 rpm |
| Wafer Back Pressure : | 0 - 50 psi / 344kPa |
| Carrier Down Pressure : | 0.4 - 9 psi / 62kPa |
| Plate Size : | 600mm |
| Slurry Flow Rate : | 20-500mls/min |
| Timer : | 0-99 hours |
| Height : | 1950mm |
| Depth : | 781mm |
| Width : | 1680mm |
| Weight : | 501Kg 730Kg (packed) |
For more information on the Orbis Chemical Mechanical Polishing system, call us on +44 (0)1389 875444 or complete our product request form.