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研磨抛光设备

Lapping and Polishing Machines and Equipment

在材料处理领域,Logitech有40余年的经验,对于不同层次的研磨抛光应用,Logitech都一整套的解决方案。

在研发和设计导向的应用领域,Logitech开发了像Compact50,PM5及LP50适用于小型处理要求的机器。

针对于量产级导向的研磨抛光应用,LP600,DH600及NGS是适用于大产量及大尺寸晶圆尺寸样品。

 

 

NGS Next Generation System

NGS Next Generation System

The NGS is a 4 station production line system for the semiconductor and opto-electronics industries where there is a requirement for high yields and faster throughput, without compromise.

LP600 Precision Lapping and Polishing Machine

LP600 Precision Lapping and Polishing Machine

The LP600 provides production-based companies with a high quality lapping and polishing facility, guaranteeing sample flatness, minimal taper and no sub-surface damage.

LP50 Auto Precision Lapping and Polishing Machine

LP50 Auto Precision Lapping and Polishing Machine

The LP50 auto-lap is a 350mm diameter bench-top lapping machine, with the unique ability to automatically maintain the flatness of the lapping plate surface.

LP50 Precision Lapping and Polishing Machine

LP50 Precision Lapping and Polishing Machine

The LP50 is a multi-workstation lapping and polishing machine that accepts 350mm lapping and polishing plates.

PM5 Auto-Lap Precision Lapping Machine

PM5 Auto-Lap Precision Lapping Machine

The PM5 auto-lap is a 300mm diameter single-workstation lapping machine, with the unique ability to automatically maintain the flatness of the lapping plate surface.

PM5 Auto-Pol Precision Lapping Machine

PM5 Auto-Pol Precision Lapping Machine

The PM5 Auto-Pol offers a revolutionary approach to flat polishing. Its microelectronics offer the highest level of automated control, reducing processing time without sacrificing polishing plate flatness.

PM5 Precision Lapping Machine

PM5 Precision Lapping Machine

The PM5 range is a new generation of single-workstation precision lapping and polishing machines offering significant refinements and benefits for all materials processing applications. It accepts 300mm diamter lapping and polishing plates.

Compact 50 Polishing System

Compact 50 Polishing System

The Compact 50 Polishing System provides the ideal solution to the problems of obtaining high quality polished thin sections with the minimum of capital investment. The system comprises the CP50 polishing machine and the WG4 motor-driven polishing head.

WG2 Polishing System

WG2 Polishing System

The WG2 Geological Thin Section Polishing System, comprised of a PM5(w) Precision Polishing machine and WG2 Polishing head, offers the best quality surface finish, the fastest possible production rates and the most economic operation.

DH600 Precision Polishing Machine

DH600 Precision Polishing Machine

The DH600 machine is an ideal system for automated final stage polishing of wafered optical materials or components such as filters, wedges, steps or even LCD panels.

Compact 50 Lapping System

Compact 50 Lapping System

The CL50 Compact Lapping Machine is a robust machine designed specifically to meet the requirements of the low volume producer of thin sections.

Orbis Chemical Mechanical Polishing System

Orbis Chemical Mechanical Polishing System

The Orbis has been designed specifically as a pilot production Chemical Mechanical Polishing system. It is ideally suited for R&D environments where testing or developing new processes would otherwise require the use of expensive production oriented tools.

Tribo Chemical Mechanical Polishing System

Tribo Chemical Mechanical Polishing System

The Tribo is a benchtop Chemical Mechanical Polishing machine capable of processing full or part wafers up to 4" (100mm) in diameter. It is supplied with a range of process data collection options offering in-depth analytical tools and allow for greater versatility and flexibility.

DL1 Precision lapping and Polishing Machine

DL1 Precision lapping and Polishing Machine

The Logitech DL1 precision lapping and polishing system allows samples up to 200mm/8” Ø (or multiple smaller samples) to be processed with high geometric accuracy, while the driven jig polishing functionality can process samples at a high speed.

DP1 Precision Polishing Machine

DP1 Precision Polishing Machine

The Logitech DP1 is a high speed polishing system designed primarily to process hard materials, such as sapphire, silicon carbide or gallium nitride, to epitaxy ready quality surfaces.

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