在材料处理领域，Logitech有40余年的经验，对于不同层次的研磨抛光应用，Logitech都一整套的解决方案。
在研发和设计导向的应用领域，Logitech开发了像Compact50,PM5及LP50适用于小型处理要求的机器。
针对于量产级导向的研磨抛光应用，LP600，DH600及NGS是适用于大产量及大尺寸晶圆尺寸样品。
Orbis Chemical Mechanical Polishing System
The Orbis has been designed specifically as a pilot production Chemical Mechanical Polishing system. It is ideally suited for R&D environments where testing or developing new processes would otherwise require the use of expensive production oriented tools.
Tribo Chemical Mechanical Polishing System
The Tribo is a benchtop Chemical Mechanical Polishing machine capable of processing full or part wafers up to 4" (100mm) in diameter. It is supplied with a range of process data collection options offering in-depth analytical tools and allow for greater versatility and flexibility.
NGS Next Generation System
The NGS is a 4 station production line system for the semiconductor and opto-electronics industries where there is a requirement for high yields and faster throughput, without compromise.
LP600 Precision Lapping and Polishing Machine
The LP600 provides production-based companies with a high quality lapping and polishing facility, guaranteeing sample flatness, minimal taper and no sub-surface damage.
LP50 Auto Precision Lapping and Polishing Machine
The LP50 auto-lap is a 350mm diameter bench-top lapping machine, with the unique ability to automatically maintain the flatness of the lapping plate surface.
LP50 Precision Lapping and Polishing Machine
The LP50 is a multi-workstation lapping and polishing machine that accepts 350mm lapping and polishing plates.
PM5 Auto-Lap Precision Lapping Machine
The PM5 auto-lap is a 300mm diameter single-workstation lapping machine, with the unique ability to automatically maintain the flatness of the lapping plate surface.
PM5 Auto-Pol Precision Lapping Machine
The PM5 Auto-Pol offers a revolutionary approach to flat polishing. Its microelectronics offer the highest level of automated control, reducing processing time without sacrificing polishing plate flatness.
PM5 Precision Lapping Machine
The PM5 range is a new generation of single-workstation precision lapping and polishing machines offering significant refinements and benefits for all materials processing applications. It accepts 300mm diamter lapping and polishing plates.
C50 Polishing System
The Compact 50 Polishing System provides the ideal solution to the problems of obtaining high quality polished thin sections with the minimum of capital investment. The system comprises the CP50 polishing machine and the WG4 motor-driven polishing head.
WG2 Polishing System
The WG2 Geological Thin Section Polishing System, comprised of a PM5(w) Precision Polishing machine and WG2 Polishing head, offers the best quality surface finish, the fastest possible production rates and the most economic operation.
CDP Automatic Chemical Mechanical Polishing System
THE CDP Automatic is a highly versatile polishing machine specifically designed for use in CMP and de-layering polishing applications where geometric precision and surface quality are of paramount importance.
DH600 Precision Polishing Machine
The DH600 machine is an ideal system for automated final stage polishing of wafered optical materials or components such as filters, wedges, steps or even LCD panels.
DH300 Precision Polishing Machine
The DH300 is a single station precision polishing machine providing both research and production oriented establishments with a high quality, automated polishing facility.
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