Ultra-pure water treated by the Wet Bench helps prevent slurry crystallisation 
Key Features
- Water cleaning process via Reverse Osmosis technology
- Integral 88 litre waste slurry tank
- Ultra-pure water filter treats and deionizes ceaned water
- Flow rate of 1.3 litres per min of ultra-pure water
Description
The CDP Wet Bench from Logitech has been designed to act as an optional "add-on" module for the CDP Auto Chemical Delayering and Planarization Polishing System. This module provides an in house supply of De-ionized Water and Nitrogen for cleaning the wafers, IC or die polished using the CDP system. Also incorporated into the Wet Bench module is a storage tank for waste slurry and a reservoir tank for containment of the cleaned water.
Reverse Osmosis System:
Ordinary tap water is fed into the Wet Bench where it is initially cleaned using Reverse Osmosis (RO). This process removes any sediment or chlorine from the water using a series of filters. The frequency with which these filters require to be changed is dependent upon the purity of tap water being fed into the Wet Bench.
Reservoir Tank:
Once the water has been treated by the RO system it travels into a reservoir tank. Constructed from rigid fluorinated polyethylene, this tank has been fitted with filters to help prevent any airborne contamination from being introduced to the cleaned water. Level controls help to monitor when the tank is either full or empty and will automatically start or stop the RO system as required.
Ultra-pure Water Filter:
The cleaned water is fed from the Reservoir Tank into an Ultra-pure Water Filter where it is deionized, treated with ultra-violet oxidation and filtered (UV/UF). At this point the water is ready to be introduced to the wafers, IC or die.
Waste Slurry Containment:
An 88 litre capacity waste tank is situated below the water treatment system for holding spent slurry. This is fed directly from the CDP process area into the tank and is kept in a sealed area in order to prevent any contamination of the water treatment area. An alarm system has been fitted to alert the operator when the tank requires to be emptied and a pump has been provided for the safe removal of the waste slurry.
Product Options
This product does not have any options available.
Product Specification
| Ultra-pure Water Flow Rate : | 1.3 litres per minute |
| Ultra-pure Water Bacterial Level : | <1 CFU/100ml |
| Ultra-pure Water Standard : | <3 ppb TOC, 18.3 megohm-cm resistivity |
| Waste Slurry Tank Capacity : | 88 litres |
For more information on the CDP Wet Bench, call us on +44 (0)1389 875444 or complete our contact form.