Up until now, semiconductor manaufacturers have had to invest significant amounts of time and effort (and therefore money) in order to configure and run large scale processing systems. Production run wafer processing machines need to minimise system downtime in order to be efficient and optimise economies of scale.
Logitech has the solution to developing these new processes while minimising the impact on production runs - The Orbis.
The Orbis has been designed specifically as a pilot production Chemical Mechanical Polishing system. It is ideally suited for R&D environments where testing or developing new processes would otherwise require the use of expensive production oriented tools. It is capable of processing full or part wafers up to 8" in diameter and is supplied with a range of process data collection options offering in-depth analytical tools.
The benchtop dimensions allow for great flexibility and the machine features the use of a lightweight, 600mm plate allowing for easier plate changing and better shape quality. At this diameter, rigorous testing has proven that the wafer to plate ratio is sufficient enough to obtain the high uniformity and flatness required on small samples from a chemical mechanical polishing system.
The Orbis allows you to collect numerous data variables via the multiple sensors in order to identify and analyse various in-situ factors on the material samples being processed.
To further advance the usefulness of this data, cutting edge, real-time analytical software is utilised on a laptop PC to convert data into meaningful information. This data can be exported to data silos for future analysis or evaluated directly with software such as Microsoft Excel.
Applications
Primary applications areas are in the field of Tribology Science and Research, particularly with regards process and analysis results (eg. CoF).
The Orbis chemical mechanical polishing system is also readily adaptable as an enabling technology in Microelectromechanical Systems (MEMS) fabrication, particularly polysilicon surface micromachining, Opto-MEMS and Bio-MEMS packaging, assembly and even fabrication.
For more information on the Orbis Chemical Mechanical Polishing system, call us on +44 (0)1389 875444 or complete our product request form .