Key Features
- 4 motor driven sweeping heads
- Variable plate speed (0-160rpm)
- Plate diameter of 600mm (23")
- Process up to 48 x 2"ø wafers or 4 x 8"ø wafers per run
- Idea for processing Sic, GaN, AIN, Sapphire
Description
The DH600 is an ideal system for automated final stage polishing of wafered optical materials or components such as filters, wedges, steps or even LCD panels. Four motor driven, sweeping polishing heads allow up to a maximum of 48 x 2" wafers to be polished at any one time, helping make the DH600 ideal for use in full production environments.
The automated control panel is joystick controlled and allows process parameters to be entered and changed at will.
The DH600 can be used for polishing wafers of virtually any optical material. Automated controls and an intelligent loading / unloading system make it the natural choice for those seeking to quickly polish wafers to an epitaxy ready surface without losing geometric control. This system is especially beneficial to those working with hard substrate materials and is capable or working with wafers up to a maximum of 8"ø.
Applications
The DH600 can be used for polishing wafers of virtually any optical material. Automated controls and an intelligent loading / unloading system make it the natural choice for those seeking to quickly polish wafers to an epitaxy ready surface without losing geometric control. This system is especially beneficial to those working with hard substrate materials and is capable of working with wafers up to a maximum of 8"ø.
Key Features
The DH system polishing heads are each designed to provide a 45Kg down load to facilitate high speed polishing. This download is applied once the heads are loaded on to the plate and the process has been started. After the set polishing time has elapsed, each head automatically lifts away from the rotating polishing plate.
Each DH system head is controlled from the LCD, joystick control panel and can be programmed to sweep across the rotating polishing plate thereby enhancing the polishing action. The sweep parameters are set from the control panel in percentage terms.
Product Options
This product does not have any options available.
Product Specification
| Power Supply : | 3 Phase 220V (440V between phases) |
| Fuse Rating : | 20A |
| Plate Speed : | 0-160rpm |
| Plate Size : | 600mm (23.6") |
| Carrier Speed : | 0-125rpm |
| Carrier Load : | 2psi - 9psi line pressure |
| Carrier Head Capacity : | 12 x 2" wafers (standard template) Other templates available upon request |
| Machine Capacity : | 48 x 2" wafers per run |
| Height : | 1800mm |
| Depth : | 900mm |
| Width : | 900mm |
For more information on the DH600 Polishing Machine, call us on +44 (0)1389 875444 or complete our contact form.