Key Features
- Greater accuracy when using CDP systems
- Available in 6", 4", 3" and 2"
- Dictate the desired level of polish
- Prolong the life cycle of the carrier's outer ring
Description
The standard Logitech template and shim kits allow for greater accuracy in polishing when using both the 1CDP41 and 1CDP61 polishing heads on the CDP system. Specifically designed to be used in conjunction with the CDP Chemical Delayering and Planarization system, the template and shim kits are available for 6", 4", 3" and 2" wafer diameters.
Templates
In order to successfully polish wafers using the CDP system, it is necessary to ensure that each wafer is securely held within its own template. These templates are in turn held by adhesive to the surface of the CDP polishing head. A protective ring is provided around the wafer and inside this template it is possible for the wafer to be processed without fear of slipping from the surface of the polishing head as it sweeps across the rotating platen.
Shim Rings and Inserts
The shim rings shown above are inserted beneath the outer ring of the carrier head in accordance with the level of material required to be removed from the wafer being held in the template. By moving the outer ring upwards using the three differently sized shim rings provided, it is possible to dictate the desired finish level of polish and also help prolong the life cycle of the carrier's outer ring.
Product Options
This product does not have any options available.
Product Specification
| Standard Template Kit Contents | ||
| 1 x | Template | - |
| 1 x | Porous insert (porometric) | Black |
| 2 x | 75µ thick shim inserts | Blue |
| 2 x | 100µ thick shim inserts | Clear |
| 2 x | 125µ thick shim inserts | Red |
| 2 x | 75µ thick shim rings | Green |
| 2 x | 100µ thick shim rings | Brown |
| 2 x | 125µ thick shim rings | Orange |
For more information on the CDP templates and shims, call us on +44 (0)1389 875444 or complete our contact form.